发明名称 位置決め装置及びビームを方向付けるためのシステム
摘要 <p>The present invention relates to an apparatus for positioning at least one optical element (22), wherein the apparatus (1) comprises at least one movable carrier (20) for holding the optical element (22), at least one fixed support portion (10) for supporting the carrier (20), connecting means for connecting the carrier and the support portion, and actuating means for creating forces to influence the relative position of the carrier (20) to the support portion (10). The apparatus (1) is characterized in that the connecting means comprise at least one retention device (32) for applying tension force between the carrier (20) and the support portion (10) and at least one bearing (31), wherein the bearing (31) comprises a first bearing magnet (311), wherein at least a part of the surface (3121) of the first bearing magnet (312) has the shape of a partial sphere and a second bearing magnet (312), wherein at least part of the surface (3111) of the second bearing magnet (311) has the shape of a partial hollow sphere for at least partially receiving the partial sphere surface (3121) of the first bearing magnet (312), wherein the first and second bearing magnets (311, 312) are permanent magnets and are arranged such that the opposing magnet poles of the first and second bearing magnet (311, 312) are facing each other. Also a system for directing a beam, in particular a laser beam, including at least one positioning apparatus is disclosed.</p>
申请公布号 JP5818981(B2) 申请公布日期 2015.11.18
申请号 JP20140515076 申请日期 2011.06.17
申请人 发明人
分类号 G02B7/00;G02B7/182;G02B7/198 主分类号 G02B7/00
代理机构 代理人
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