| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To shorten a time to be spent on insulation inspection with respect to a homogeneous substrate formed with a conductor pattern. <P>SOLUTION: A processing part 7 is configured to, on the basis of grouping information showing the grouping of N conductor patterns P of one slave substrate of each of inspection processing ranging from the first to La-th inspection processing into the first group and second group such that the N conductor patterns P can be inspected by the execution of the inspection processing whose number of times is La which is equal to or more than log<SB POS="POST">2</SB>N and which is the closest to log<SB POS="POST">2</SB>N, select each conductor pattern P included in the first group of the inspection processing on homogenous M slave substrates as one measurement object conductor group and each conductor pattern P included in the second group of the inspection processing on the M slave substrates as the other measurement object conductor group, and to execute connection processing of connecting those conductor patterns P to a measurement part 6 for each inspection processing, and to execute first processing of inspecting an insulated state between the conductor patterns P for the M slave substrates. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
