| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve practicality of a support device for supporting a substrate-related operation regarding quality deterioration of an operation result. <P>SOLUTION: A support device 10 is constituted so as to calculate (a) an operation machine quality index which is a quality index of substrate-related operation machines 24, 30, 38 themselves, and (b) a portion group quality index which is a quality index for a portion group consisting of one or more operation portions as quality indexes showing quality of a substrate-related operation on the basis of inspection data on the inspection machines 26, 34, 30, and to display the two quality indexes on a display device 49. In consideration of the two quality indexes, it becomes possible for an operator to easily grasp a factor of deterioration of the quality indexes while grasping quality deterioration of the substrate-related operation machine. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
