| 摘要 |
Provided is a surface shape measuring device (140) wherein a displacement meter (100) comprises: a light emitting unit (110) that projects a light beam (116) toward a measurement subject (130); an optical system (118) that focuses the scattered light of the light beam from the measurement subject (130); and a light receiving unit (120) that detects the focus position of the optical system (118). A movement mechanism (146) scans the light beam (116) by causing the displacement meter (100) and the measurement subject (130) to move relatively. A measurement control unit (156) is configured as follows: in order that the light receiving unit (120) is positioned, with respect to the light emitting unit (110), ahead of or following the scanning direction of the light beam (116), the light beam (116) is scanned by the movement mechanism (146), and during scanning of the light beam (116), the surface displacement of the measurement subject (130) is continuously measured, as surface shape data, by the displacement meter (100). |
