Ozone gas generation unit and ozone gas supply system

摘要

In the present invention, a gas pipe integrated block has a plurality of internal pipe paths. The plurality of internal pipe paths are connected to an ozone generator, control means, a raw gas supply port, an ozone gas output port, and cooling water inlet/outlet ports, to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through an automatic pressure controller to the ozone generator. The ozone gas output pipe path extends from the ozone generator through a gas filter, an ozone concentration meter, and a flow rate controller, to the ozone gas output port.

主权项

1. An ozone generation unit, comprising:
an ozone generator for generating an ozone gas; an ozone power source for controlling power to be supplied to the ozone generator; a controller associated with the ozone generator; a raw gas supply port for supplying a raw gas from the outside to the ozone generator; an ozone gas output port for outputting, to the outside, the ozone gas obtained from the ozone generator through at least part of the controller; cooling water inlet/outlet ports for supplying and discharging a cooling water obtained from the outside to the ozone generator; and a gas pipe integrated block, wherein the ozone generation unit is formed as an integrated structure in which the ozone generator, the ozone power source, the controller, the raw gas supply port, the ozone gas output port, and the cooling water inlet/outlet ports are assembled together, the controller comprises: a flow-rate-detector/flow-rate-adjustor comprising a mass flow controller (MFC) for controlling a flow rate of the raw gas inputted to the ozone generator; a gas filter for processing the ozone gas outputted from the ozone generator to remove an impurity and a foreign substance; a pressure-detector/pressure-adjustor comprising an automatic pressure controller (APC) for automatically controlling internal pressure of the ozone generator; and ozone concentration detector comprising an ozone concentration meter for detecting an ozone concentration value of the ozone gas outputted from the ozone generator, each of the ozone generator, the flow-rate-detector/flow-rate-adjustor, the gas filter, the pressure-detector/pressure-adjustor, the ozone concentration detector, the raw gas supply port, the ozone gas output port, and the cooling water inlet/outlet ports is mounted to the gas pipe integrated block in close contact, the gas pipe integrated block has a three-dimensional structure, the flow-rate-detector/flow-rate-adjustor, the gas filter, the pressure-detector/pressure-adjustor, and the ozone concentration detector are arranged on one or more surfaces of the gas pipe integrated block, the gas pipe integrated block has a plurality of internal pipe paths, the plurality of internal pipe paths are connected to the ozone generator, the flow-rate-detector/flow-rate-adjustor, the gas filter, the pressure-detector/pressure-adjustor, the ozone concentration detector, the raw gas supply port, and the ozone gas output port, to form a raw gas input pipe path and an ozone gas output pipe path, the raw gas input pipe path extends from the raw gas supply port through the flow-rate-detector/flow-rate-adjustor to the ozone generator, and the ozone gas output pipe path extends from the ozone generator through the gas filter, the ozone concentration detector, and the pressure-detector/pressure-adjustor, to the ozone gas output port.