发明名称 移送および格納容器の処理装置
摘要 A treatment device for transport and storage boxes according to the invention comprises a plurality of decontamination modules (24-27) supported by a common chassis (100) and arranged in a row of at least one column (23c) of modules superposed one on top of the other. Each decontamination module (24-27) comprises its own pumping means (6) having at least a primary pump (8a) housed in a primary pumping compartment (8c) that is longitudinally offset from the decontamination chamber (5). Access to the decontamination modules (24-27) is had via side access doors which are all oriented on one and the same access side and which are acted upon by actuating means that automatically close and open them. A lateral transfer zone is provided on the access side, and comprises a robot (29) capable of moving the transport and storage boxes between a frontal loading-unloading station (23a) and the decontamination chambers (5) of each of the decontamination modules (24-27). The amount of space occupied by and the throughput of the treatment device (23) are thus optimized.
申请公布号 JP5814362(B2) 申请公布日期 2015.11.17
申请号 JP20130517235 申请日期 2011.06.27
申请人 发明人
分类号 H01L21/677;G03F1/66;H01L21/304 主分类号 H01L21/677
代理机构 代理人
主权项
地址
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