发明名称 構造体、及び半導体基板の製造方法
摘要 <p>A structural body includes a sapphire underlying substrate; and a semiconductor layer of a group III nitride semiconductor disposed on the underlying substrate. An upper surface of the underlying substrate is a crystal surface tilted at an angle of 0.5° or larger and 4° or smaller with respect to a normal line of an a-plane which is orthogonal to an m-plane and belongs to a {11-20} plane group, from the m-plane which belongs to a {1-100} plane group.</p>
申请公布号 JP5814131(B2) 申请公布日期 2015.11.17
申请号 JP20110553839 申请日期 2011.02.08
申请人 发明人
分类号 C30B29/38;C23C16/34;H01L21/205 主分类号 C30B29/38
代理机构 代理人
主权项
地址