| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a terminal unit for a vacuum treatment device which is high in the reliability of a vacuum chamber requiring air tightness, can be attached to a vacuum partitioning wall at favorable workability, and is low in cost. <P>SOLUTION: The terminal unit for the vacuum treatment device comprises a vacuum flange 1 being the vacuum partitioning wall, a plate-shaped insulating body 3 joined to a single face of the vacuum flange, and a plate-shaped conductor 4 joined to the surface of the insulating body. There is formed a hole 6 which penetrates the vacuum flange and the insulating body from the other face side of the vacuum flange and continues to the conductor, and a connecting terminal 7 protruding to the outside of the other face side of the vacuum partitioning wall through the hole is arranged at the side of the hole of the conductor. In that case, the conductor is constituted of a plurality of plate-shaped conductor pieces 41 which are aligned on the surface of the insulating body and joined to one another, the conductor has prescribed intervals 42 between the adjacent conductor pieces, and each conductor piece is cut at its edge. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
