发明名称 電気機械変換装置及びその製造方法
摘要 <p>Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity.</p>
申请公布号 JP5812660(B2) 申请公布日期 2015.11.17
申请号 JP20110093370 申请日期 2011.04.19
申请人 发明人
分类号 H04R19/00;B81B3/00;B81C3/00;H04R31/00 主分类号 H04R19/00
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