发明名称 Bootstrap MOS for high voltage applications
摘要 A device includes a p-well region, and a first High-Voltage N-type Well (HVNW) region and a second HVNW region contacting opposite edges of the p-well region. A P-type Buried Layer (PBL) has opposite edges in contact with the first HVNW region and the second HVNW region. An n-type buried well region is underlying the PBL. The p-well region and the n-type buried well region are in contact with a top surface and a bottom surface, respectively, of the PBL. The device further includes a n-well region in a top portion of the p-well region, an n-type source region in the n-well region, a gate stack overlapping a portion of the p-well region and a portion of the second HVNW region, and a channel region under the gate stack. The channel region interconnects the n-well region and the second HVNW region.
申请公布号 US9190535(B2) 申请公布日期 2015.11.17
申请号 US201414265721 申请日期 2014.04.30
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Yeh Jen-Hao;Cheng Chih-Chang;Su Ru-Yi;Huo Ker Hsiao;Chen Po-Chih;Yang Fu-Chih;Tsai Chun-Lin
分类号 H01L29/80;H01L29/808;H01L29/40;H01L29/66;H01L29/06;H01L27/088;H01L27/098 主分类号 H01L29/80
代理机构 Slater & Matsil, L.L.P. 代理人 Slater & Matsil, L.L.P.
主权项 1. A device comprising: a buried well region of a first conductivity type; a first High-Voltage Well (HVW) region of the first conductivity type over the buried well region; a first well region of a second conductivity type opposite to the first conductivity type, wherein the first well region comprises an edge contacting an edge of the first HVW region; a drain region of the first conductivity type in a surface portion of the first HVW region; a first source region of the first conductivity type in a surface portion of the first well region; a first gate electrode over the first HVW region and the first well region, with the drain region and the first source region on opposite sides of the first gate electrode; a plurality of buried regions of the second conductivity type, wherein the plurality of buried regions is parallel to each other, and is over and contacting a top surface of the buried well region; and a plurality of HVW regions of the first conductivity type separating the plurality of buried regions from each other, wherein the plurality of buried regions and the plurality of HVW regions are spaced apart from the first source region by the first well region.
地址 Hsin-Chu TW