| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface pressure sensor which has small variation with time and small temperature dependence, capable of measuring accurate values through repetitive use. <P>SOLUTION: A surface pressure sensor comprises a substrate 11, and a plurality of metal resistance strain gauges 12 which are directly disposed on the substrate 11. The lower face side of the substrate 11 is provided with recesses 14 at the positions corresponding to the one or more metal resistance strain gauges 12 such that the substrate 11 is deformable. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
