发明名称 加工装置
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a machining device capable of improving productivity without enlarging the entire device. <P>SOLUTION: This is a machining device for turning a workpiece held by chuck tables, including: a first chuck table and a second chuck table holding the workpiece; a first turning means and a second turning means having cutting tools for turning the workpiece held by the first chuck table and second chuck table; a workpiece carrying-in means for carrying an unmachined workpiece in the first chuck table and second chuck table; and a workpiece carrying-out means located on the first chuck table and second chuck table to carry out the machined workpiece to a washing means. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5816060(B2) 申请公布日期 2015.11.17
申请号 JP20110248583 申请日期 2011.11.14
申请人 发明人
分类号 B23D5/02;H01L21/304 主分类号 B23D5/02
代理机构 代理人
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