发明名称 スパッタリングターゲットの構成要素の接合方法、スパッタリングターゲットの構成要素の接合アセンブリ、および接合アセンブリの使用
摘要 <p>The invention describes a method for bonding components of a sputtering target, comprising the following steps: providing a first component and a second component, the harder of which has undercut protrusions; positioning them against each other; and pressing them towards each other resulting in a plastic deformation of the material of at least one of the two components, filling the undercuts thereby creating interlocking, as well as the bonded assembly so created, and its recycling. No step creating bonding other than interlocking on a major part of the bonded surface area is necessary.</p>
申请公布号 JP5812542(B2) 申请公布日期 2015.11.17
申请号 JP20130514738 申请日期 2011.06.17
申请人 发明人
分类号 C23C14/34 主分类号 C23C14/34
代理机构 代理人
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