Method for manufacturing physical quantity detector, and physical quantity detector

摘要

A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.

主权项

1. A method for manufacturing a physical quantity detector comprising a base part having a flat, frame structure, a moving part having a flat, plate structure and which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part across the joint part, the method comprising:
integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on the other end side of the moving part as a free end thereof and connects the base part and the moving part to each other by using at least one of crystal, glass, and silicon; forming the connecting part such that the connecting part includes two narrow parts and a removal part between the two narrow parts when viewed in a plan view in the thickness direction of the moving part; laying and fixing the physical quantity detection element on the base part and the moving part; pressing and cutting the connecting part so as to cut off the two narrow parts of the connecting part.