Process for fabricating an optimally-actuating piezoelectric membrane

摘要

In a process for fabricating a membrane, including, on a substrate, a thin-film multilayer including a film of piezoelectric material placed between a top electrode film and a bottom electrode film and an elastic film supporting said piezoelectric film, the process includes: determining at least one concavity/convexity curvature of said membrane along an axis parallel to the plane of the films so that at least one inflection point is defined, said point allowing a first region and a second region, corresponding to a concave part and a convex part or vice versa, to be isolated; depositing, on the surface of the substrate, a thin-film multilayer including at least one film of piezoelectric material, one bottom electrode film and one top electrode film; and structuring at least one of the electrode films to define at least said first membrane region, in which an electric field perpendicular to the plane of the films may be applied, and at least said second region, in which an electric field parallel to the plane of the films may be applied.

主权项

1. A process for fabricating a membrane comprising, on a substrate, a thin-film multilayer, said thin-film multilayer comprising a film of piezoelectric material placed between a top electrode film and a bottom electrode film and an elastic film for supporting said piezoelectric film, said process comprising:
determining at least one of concavity and convexity curvature of said membrane along an axis parallel to a plane of the films so that at least one inflection point is defined, said point allowing a first region and a second region, corresponding to a concave part and a convex part, or vice versa, to be isolated; depositing, on the surface of the substrate, a thin-film multilayer comprising at least one film of piezoelectric material, one bottom electrode film and one top electrode film; and structuring at least one of the electrode films according to the said at least inflection point defined and so to define at least said first region, in which an electric field perpendicular to the plane of the films is applied, and at least said second region, in which an electric field parallel to the plane of the films is applied, wherein both a portion of the top electrode film and a portion of the bottom electrode film are present in the second region.