| 发明名称 | Antireflection coating using self-assembly nano structure and manufacture method thereof | ||
| 摘要 | In an aspect of the present disclosure, there is disclosed a manufacture method of an antireflection coating using a self-assembly nano structure, which includes forming a first metal droplet on a substrate by means of droplet epitaxy, depositing a first non-metal on the formed first metal droplet, and forming a first nano compound crystal by means of self-assembly of the deposited first non-metal and the first metal droplet. | ||
| 申请公布号 | US9190541(B2) | 申请公布日期 | 2015.11.17 |
| 申请号 | US201313906618 | 申请日期 | 2013.05.31 |
| 申请人 | KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY | 发明人 | Song Jin-Dong;Lee Eunhye;Bae Min Hwan;Choi Won Jun;Yoon Jae Jin;Han Il Ki |
| 分类号 | H01L33/00;H01L31/0216;H01L33/44 | 主分类号 | H01L33/00 |
| 代理机构 | Ladas & Parry LLP | 代理人 | Ladas & Parry LLP |
| 主权项 | 1. A manufacture method of an antireflection coating using a self-assembly nano structure, comprising: forming a first metal droplet comprising aluminum on a substrate by means of droplet epitaxy; depositing a first non-metal on the formed first metal droplet, wherein the first non-metal is selected from the group consisting of antimony, phosphorus, and nitrogen; and forming a first nano compound crystal by means of self-assembly of the deposited first non-metal and the first metal droplet. | ||
| 地址 | Seoul KR | ||