发明名称 |
Non-contacting conveyance equipment |
摘要 |
Non-contacting conveyance equipment for conveying a plate-like member in a non-contacting manner comprises a plate-like base body and a plurality of swirl flow-forming bodies provided at the base body. Each of the plurality of swirl flow-forming bodies includes a column-shaped main body, a cylindrical chamber formed inside the main body, that has an opening at one end, a flat end face formed at a surface of the main body, in which the cylindrical chamber is opened, a jetting port provided at an inner circumferential surface of the cylindrical chamber, a fluid introduction port provided at an outer circumferential surface of the main body, and a fluid passage that connects the fluid introduction port to the jetting port. |
申请公布号 |
US9187256(B2) |
申请公布日期 |
2015.11.17 |
申请号 |
US201214117499 |
申请日期 |
2012.08.24 |
申请人 |
HARMOTEC CO., LTD. |
发明人 |
Iwasaka Hitoshi;Tokunaga Hideyuki;Koshiishi Katsuhiro |
分类号 |
H01L21/683;B65G25/00;H01L21/687 |
主分类号 |
H01L21/683 |
代理机构 |
Oliff PLC |
代理人 |
Oliff PLC |
主权项 |
1. Non-contacting conveyance equipment for conveying a plate-like member in a non-contacting manner, comprising:
a plate-like base body; and a plurality of swirl flow-forming bodies provided at the base body, wherein each of the plurality of swirl flow-forming bodies includes: a column-shaped main body; a cylindrical chamber formed inside the main body, that has an opening at one end; a flat end face formed at a surface of the main body, on which the cylindrical chamber is opened; a jetting port provided at an inner circumferential surface of the cylindrical chamber; a fluid introduction port provided at an outer circumferential surface of the main body; and a fluid passage that connects the fluid introduction port to the jetting port, wherein the fluid passage is arranged so that a direction in which a fluid flows out of the cylindrical chamber along the end face is substantially parallel to a line that extends from a center of gravity of the plate-like member being conveyed, toward an outer circumference of the plate-like member. |
地址 |
Kofu JP |