| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique which reduces the frequency of replacement of a spatial light modulator by prolonging an available time of the spatial light modulator. <P>SOLUTION: The drawing device 100 comprises an optical unit 40. Light radiated from a laser oscillator 41 provided in the optical unit 40 is introduced into a spatial light modulator 441 via an illumination optical system 43. The spatial light modulator 441 spatially modulates incident light L1 entering into an effective reflection surface ER as a part of an entire reflection surface 420f. By performing a pattern drawing for a predetermined time, an instruction of a controller 90 displaces a location of an illumination system focus lens 435 included in the illumination optical system 43. Therefore an incident position of the incident light L1 incoming on the effective reflection surface ER is displaced, and an incident region NR1 formed on the effective reflection surface ER is shifted to a region on the effective reflection surface ER where the light is not radiated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
