| 发明名称 | Differential pressure sensor | ||
| 摘要 | There is provided a differential pressure sensor capable of measuring a pressure fluctuation with a simple structure. The differential pressure sensor includes a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior, and a detector provided at the opening. The detector includes a cantilever provided in a manner tiltable so as to block off the opening, and the cantilever is formed with a Piezo resistor layer. | ||
| 申请公布号 | US9188497(B2) | 申请公布日期 | 2015.11.17 |
| 申请号 | US201213982390 | 申请日期 | 2012.01.11 |
| 申请人 | The University of Tokyo | 发明人 | Shimoyama Isao;Matsumoto Kiyoshi;Takahata Tomoyuki;Kan Tetsuo;Kuwana Kenta;Takahashi Hidetoshi;Nguyen Minh-Dung |
| 分类号 | G01L9/00;G01L9/06;H04R21/02;G01L13/02;G01L19/14 | 主分类号 | G01L9/00 |
| 代理机构 | Locke Lord LLP | 代理人 | Locke Lord LLP |
| 主权项 | 1. A differential pressure sensor comprising: a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior; and a detector provided at the opening, the main body being closed except the opening, the detector comprising a cantilever provided in a manner tiltable so as to block off the opening, the cantilever being formed with a piezoresistor layer, a gas flowing between the interior of the air chamber and the exterior through a gap formed between an external edge of the cantilever and the opening, and the gap being equal to or smaller than 100 times of an average free path of molecules of the gas flowing in the air chamber from the exterior through the gap. | ||
| 地址 | Tokyo JP | ||