摘要 |
<p>A POLISHING COMPOSITION FOR A GLASS SUBSTRATE OF HARD DISK DRIVE, WHICH CAN PROVIDE BOTH A HIGH POLISHING RATE AND A HIGH CLEANLINESS AND CAN MAINTAIN THE HIGH POLISHING RATE FOR A LONG TIME IN A RECIRCULATION POLISHING, IS PROVIDED. IN AN ASPECT, THE PRESENT INVENTION RELATES TO A POLISHING COMPOSITION FOR A GLASS SUBSTRATE OF HARD DISK DRIVE, WHICH CONTAINS AN AMINE COMPOUND, AN ACID, SILICA PARTICLES AND WATER, WHERE THE AMINE COMPOUND IS SELECTED FROM THE GROUP CONSISTING OF AMINO ALCOHOL AND PIPERAZINE AND THE DERIVATIVE, HAVING TWO OR THREE NITROGEN ATOMS IN THE MOLECULE, AND AT LEAST ONE OF THE NITROGEN ATOMS IS IN THE FORM OF A PRIMARY AMINE OR A SECONDARY AMINE.</p> |