| 摘要 |
PROBLEM TO BE SOLVED: To provide a small and highly reliable MEMS element capable of high frequency operation, in which variation of operation frequency is reduced.SOLUTION: A MEMS element 1000 has a cavity 108 formed in a substrate 100, a diaphragm 101 provided above the cavity 108, and a piezoelectric element 111 provided on the diaphragm 101. The diaphragm 101 has a lamination of at least a first thin film 102 and a second thin film 103, and the piezoelectric element 111 includes a first electrode 104, a second electrode 106, and a piezoelectric material 105 sandwiched by the first electrode 104 and second electrode 106. Consequently, a highly reliable MEMS element capable of high frequency operation, in which variation of operation frequency is reduced, can be achieved. |
