INVERTER, SUBSTRATE PROCESSING DEVICE, AND INCLINATION ADJUSTMENT METHOD OF INVERTER

摘要

PROBLEM TO BE SOLVED: To shorten the time required for the inclination adjustment of an inverter.SOLUTION: The inverter includes: a pair of arms for holding an edge of a wafer W; a shaft which is attached to the pair of arms and drawn between the pair of arms; a drive mechanism capable of elongating/contracting the shaft in a drawing direction of the shaft; and a rotation mechanism capable of rotating the drive mechanism, the shaft and the pair of arms around a rotary shaft that is drawn in the drawing direction of the pair of arms. The inverter also includes a rod-like regulation pin 315 which is provided while penetrating an arm 310-1 and a flange 314a of the shaft and regulates the arm 310-1 from being rotated around the flange 314a of the shaft.