| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method and a cleaning apparatus which enable an economical cleaning without causing environmental load.SOLUTION: By first treatment means 13, a cleaning object is degreased with a water-based cleaning liquid 27. The cleaning object the treatment of which is finished with the first treatment means 13 is cleaned, without rinsing treatment with water, with a detergent made of a hydrocarbon-based detergent 28 or a fluorine-based detergent 54 having a boiling point different than water by second treatment means 14. The cleaning object the treatment of which is finished with the second treatment means 14 is dried with third treatment means 15. |
