INSTALLATION METHOD OF PHOTOSENSITIVE FILM, METHOD OF MANUFACTURING PHOTOSENSITIVE FILM, ELECTRO-OPTIC DEVICE AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of installing a resist film, with good shape accuracy, in a region of thin film thickness.SOLUTION: An installation method of a photosensitive film has a step for installing a photosensitive film 15 on a substrate body 10, exposing by using a halftone mask 30 having a light transmittance of three gray scale or more, and developing the photoresist film 15. The photoresist film 15 after development has a first photoresist film 16 and a second photoresist film 17 thicker than the first photoresist film 16, and the second photoresist film 17 is installed in a place of the substrate body 10 where it can be installed without removing the photoresist film 15.