| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm vacuum pump for improving the degree of freedom in the arrangement of pipings to be connected to an intake passage and an exhaust passage while improving the assemblability of an intake side check valve and an exhaust side check valve.SOLUTION: The intake side check valve and the exhaust side check valve are each formed by a valve unit 32 having a valve element 32f stored in a case member 32a. The intake passage and the exhaust passage are each formed by a nozzle 31 having a large-diameter mounting part 31a at the base end. At the base end of the large-diameter mounting part 31a, a storage part 31b is provided for storing the valve unit 32. The valve unit 32 is stored in the storage part 31b, the large-diameter mounting part 31a is inserted into an insertion hole of each pump chamber, and a presser plate 34 is mounted over the outer face of the large-diameter mounting part 31a and the outer face of the ceiling wall of the pump chamber. Thus, the intake passage and the exhaust passage are each fixed to the pump chamber. |
