用于检测半导体晶圆的Ｘ射线检测装置（五）;X-RAY INSPECTION APPARATUS FOR INSPECTING SEMICONDUCTOR WAFERS

摘要

一种x射线检测系统包含：箱，该箱含有x射线源、用于支撑将要检测的样本的样本支撑件，及x射线侦测器；以及空气推进器，该空气推进器经组配以经由该样本支撑件上方的该箱中之空气入口将空气推进至该箱中，其中该空气推进器及该箱经组配以推进空气自该空气入口经过该样本支撑件至该样本支撑件下方的该箱中之空气出口而穿过该箱。该箱可经构造以提供x射线屏蔽。此类型之x射线系统可在清洁室环境中用来检测诸如半导体晶圆的物品。; and an air mover configured to force air into the cabinet through an air inlet in the cabinet above the sample support, wherein the air mover and cabinet are configured to force air through the cabinet from the air inlet past the sample support to an air outlet in the cabinet below the sample support. The cabinet may be constructed to provide an x-ray shield. An x-ray system of this type can be used in a clean room environment to inspect items such as semiconductor wafers.