| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment device for two energy beams which reduces power cost to be invested in a 2EUV light source device, and a method thereof.SOLUTION: A first laser beam 17a is made incident through a beam splitter M2 and a movable lens 11b for adjusting a spot diameter to a movable mirror M3. A second laser beam 17b is made incident through a 1/2 wavelength plate 11a, a movable mirror M1, the beam splitter M2 and the movable lens 11b to the movable mirror M3. A part of both the beams is made incident through the movable mirror M3 to a CCD 31 and another part is reflected by the movable mirror M3 and irradiates one of electrodes 2a and 2b. By controlling an angle of the movable mirror M3, irradiation positions of both the beams on the electrodes 2a and 2b are adjusted and both the beams are aligned by adjusting the angle of the movable mirror M1 while monitoring positions of both the beams to be received by the CCD 31. |
