| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for forming and drying a coating film, in which discharging of film fluid onto a substrate and drying of the coating film formed on the substrate can be made to be performed by a compact device, time required from discharging to drying is largely shortened, and furthermore, utilization rate of the film liquid is improved as much as possible.SOLUTION: A device for forming and drying a coating film includes: a film liquid discharge part 2 which discharges film liquid onto a substrate 3 and forms the coating film; and coating film drying parts 13, 35, 36 which dry the coating film formed on a substrate. The film liquid discharge part 2 has an ink jet head 5 and also has a transfer robot 40 which transports the substrate 3 between the film liquid discharge part 2 and the coating film drying part. The film liquid discharge part 2, the coating film drying parts and the transfer robot 40 are housed in an internal space in a single enclosure. |
