发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which reduces the strength of an electric wave propagating through a semiconductor substrate and returning to an element layer.SOLUTION: A semiconductor device 10 includes: a first surface 10a and a second surface 10b; an element layer 12 disposed at the first surface 10a side; a semiconductor substrate 11 forming the second surface 10b; and multiple grooves 20 disposed on the second surface 10b in a cyclic manner.
申请公布号 JP2015204355(A) 申请公布日期 2015.11.16
申请号 JP20140082616 申请日期 2014.04.14
申请人 FUJITSU LTD 发明人 SUZUKI TOSHIHIDE
分类号 H01L21/822;H01L27/04 主分类号 H01L21/822
代理机构 代理人
主权项
地址