| 摘要 |
PROBLEM TO BE SOLVED: To provide a metrology system that can accurately meter a center coordinate of a target sphere without an error in short time.SOLUTION: A metrology system S is configured to identify a geometrical error using an initial position metrological step (S1) that identifies a coordinate of a target sphere 6 and a dimension of the target and an indexing metrological step (S3) that positions a rotary axis according to a plurality of indexing conditions, and identifies a geometrical error from a sensor metrological coordinate value serving as a coordinate value obtained by metering the target sphere 6 with a sensor 32 of a touch probe 31. In the indexing metrological step (S3), only three-time metering of the target sphere 6 by the sensor 32 allows the coordinate of the target sphere 6 to be obtained using the dimension of the target sphere obtained in the initial position metrological step (S1). |
