| 摘要 |
PROBLEM TO BE SOLVED: To provide a purge device capable of replacing the gas in a vessel by replacement gas of high concentration, and to provide a load port.SOLUTION: A purge device 20 includes a main outlet 21a arranged in a region on the right side X2 of a substrate conveyance path 5, and moving the gas in a vessel 100 in a direction along the rear wall 105, by making the replacement gas in the vessel 100 flow out, and then moving the gas to the opening 103 side, and an auxiliary outlet 22a arranged in a region on the left side X1 of the substrate conveyance path 5, and making the replacement gas flow out in a direction for revolving a part of the gas, moving to the opening 103 side by outflow of the replacement gas from the main outlet 21a, in the vessel 100. |
