| 摘要 |
PROBLEM TO BE SOLVED: To prevent particulate dust from being deposited to a disk-shaped workpiece by preventing a cleaning fluid that is scattered and misted, from being deposited on the disk-shaped workpiece again.SOLUTION: A clean air supply part 134 is disposed in a drying unit 13, the clean air supply part 134 blows clean air from an upper side of a disk-shaped workpiece 20b that is held by an outer peripheral holding mechanism 131, to the disk-shaped workpiece 20b, and the clean air passes through an inflow port of a blocking wall 15 and flows from a side of the drying unit 13 to a side of a cleaning unit 12. The clean air flowing into the side of the cleaning unit 12 crosses a periphery of the disk-shaped workpiece 20a held by the cleaning unit 12 and is then exhausted from an exhaust port 111 of an outer wall 11 to the outside. The flow of the clean air is maintained during all the processes of cleaning, carrying and drying. |
