FLOW CONTROLLER INSPECTION METHOD, FLOW CONTROLLER INSPECTION SYSTEM, AND FLOW CONTROLLER INSPECTION SYSTEM PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a flow controller inspection method that can improve inspection accuracy in a low flow region while shortening a waiting time and a time actually required for inspection.SOLUTION: A flow controller inspection method makes an inspection object flow controller 4 be in a flow control state after the flow of fluid flowing through a channel has become a prescribed flow or the pressure of fluid flowing through the channel has become a prescribed pressure, and switches so that a flow controller 5 serving as a benchmark is made in a flow non-control state by having a second valve control unit 51 of the flow controller 5 serving as a benchmark keep the opening of the second valve constant.