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发明名称
平板显示器用配线膜
摘要
本发明之平板显示器用配线膜,系由第一层与第二层积层而成的积层构造构成,该第一层含有由Mo、Ti、Cr、W、及Ta构成之群所选出的至少一种以上之高融点金属;该第二层由包含0.01原子%以上、小于0.2原子%之范围的稀土元素、Ni、及Co之中至少一种以上的Al合金构成。该配线膜即使接受400℃以上500℃以下之高温之热履历,亦可以抑制配线电阻之上升,不会产生小丘等,耐热性良好。
申请公布号
TW201543555
申请公布日期
2015.11.16
申请号
TW104104055
申请日期
2015.02.06
申请人
神户制钢所股份有限公司 KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.)
发明人
后藤裕史 GOTO, HIROSHI;岩成裕美 IWANARI, YUMI
分类号
H01L21/28(2006.01);C22C21/00(2006.01);H01L21/285(2006.01);H05K1/09(2006.01);H01L27/12(2006.01)
主分类号
H01L21/28(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本 JP
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