用于在由载具所支撑的基板上沉积一或多层的系统以及使用之方法;SYSTEM FOR DEPOSITING ONE OR MORE LAYERS ON A SUBSTRATE SUPPORTED BY A CARRIER AND METHOD USING THE SAME

摘要

叙述一种用于沉积一或多层的系统，特别是包含有机材料于其中的层。系统包含：一装载室，用于装载待处理的基板；一移送室，用于传送基板；一真空摆动模组，提供在装载室和移送室之间；至少一沉积设备，用于在至少一沉积室的一真空室中沉积材料，其中该至少一沉积设备连接至移送室；另一装载室，用于卸载已处理的基板；另一移送室，用于传送基板；另一真空摆动模组，提供在该另一装载室和该另一移送室之间；以及一载具返回轨道，从该另一真空摆动模组通往真空摆动模组，其中载具返回轨道用以在真空条件和/或受控制的惰性气氛下传送载具。; a further load lock chamber for unloading the substrate that has been processed, a further transfer chamber for transporting the substrate, a further vacuum swing module provided between the further load lock chamber and the further transfer chamber, and a carrier return track from the further vacuum swing module to the vacuum swing module, wherein the carrier return track is configured to transport the carrier under vacuum conditions and/or under a controlled inert atmosphere.