FINE CHANNEL RESONATOR AND MANUFACTURING METHOD OF THE SAME

摘要

A manufacturing method of a fine channel resonator of the present invention can measure the mass and characteristics of a target by using the principle that a resonant frequency changes according to the mass of a moving material. The method comprises the steps of: providing a silicone substrate; forming a cavity channel in the silicone substrate; forming a hollow silicone oxide structure on the internal wall surface of the cavity channel by oxidizing the internal wall surface of the cavity channel; forming a hollow polysilicon structure on the internal wall surface of the hollow silicon oxide structure; and selectively removing the surrounding of the hollow polysilicon structure for the hollow polysilicon structure to be able to make a resonant motion toward the silicon substrate. Provided is a hollow fine channel structure allowing a material which moves by the remaining hollow polysilicon structure remaining to do a resonant motion as the material surrounding the hollow polysilicon structure is selectively removed.