INTEGRATED PACKAGE CONTAINING MEMS ACOUSTIC SENSOR AND ENVIRONMENTAL SENSOR AND METHODOLOGY FOR FABRICATING SAME

摘要

An integrated package of at least one environmental sensor and at least one MEMS acoustic sensor is disclosed. The package contains a shared port that exposes both sensors to the environment, wherein the environmental sensor measures characteristics of the environment and the acoustic sensor measures sound waves. The port exposes the environmental sensor to an air flow and the acoustic sensor to sound waves. An example of the acoustic sensor is a microphone and an example of the environmental sensor is a humidity sensor.

主权项

1. A device comprising:
a package; a MEMS acoustic sensor disposed in the package; an environmental sensor disposed in the package; and a port disposed in the package configured to receive acoustic waves for the acoustic sensor and air for the environmental sensor; wherein, the package includes an acoustically sealed back cavity associated with the acoustic sensor.