发明名称 ENCLOSURE FOR A TARGET PROCESSING MACHINE
摘要 The invention relates to an assembly (1) for enclosing a target processing machine. The assembly comprises an enclosure (2) and a transfer unit (3). The enclosure comprises a base plate (21) for arranging said target processing machine thereon, side wall panels (22), which are fixed to said base plate, and a top wall panel (23) which is fixed to said side wall panels. In addition, the enclosure comprises an access opening (24) in a side wall of the enclosure. The transfer unit comprising one or more transfer elements (31) for moving the transfer unit with respect to the base plate. The transfer unit further comprises a door panel (32) which is arranged for closing the access opening, wherein the door panel is movably mounted to the transfer unit by means of a flexible coupling (33) which allows a movement of the door panel with respect to the transfer unit at least in a direction towards and/or away from the enclosure.
申请公布号 WO2015170972(A1) 申请公布日期 2015.11.12
申请号 WO2015NL50303 申请日期 2015.05.01
申请人 MAPPER LITHOGRAPHY IP B.V. 发明人 VIJVERBERG, JOEP GERARD;PLANDSOEN, LAURENS VINCENT;VAN GELDER, BAS;DE BOER, GUIDO;DANSBERG, MICHEL PIETER
分类号 G03F7/20 主分类号 G03F7/20
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