| 摘要 |
PROBLEM TO BE SOLVED: To provide an abrasive pad capable of remarkably reducing the occurrence of defects of a polished object, an abrasive pad excellent in polishing stability, and a method for manufacturing the abrasive pads.SOLUTION: According to one embodiment, an urethane foam sheet showing negative thermal expansion when loading a pressure more than 2.5 psi (17 kPa) at a temperature of 40-50°C is used for an abrasive pad. The urethane foam sheet preferably shows positive thermal expansion when loading a pressure less than 1.0 psi (6.9 kPa) at a temperature of 40-50°C. According to another embodiment, an urethane foam sheet having a strain constant of 45-150 μm/psi when loading a pressure of 1.0-2.5 psi is used for an abrasive pad. |
