| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing method for dividing a tabular object without damaging a device or generating chipping.SOLUTION: The processing method includes: a protection film coating step of coating a surface Wa of a tabular object W1 (W2) with a semi-cured protection film 1a; a film removing step of removing the protection film 1a on a predetermined dividing line S by abutting ball abutting means 20 to the surface Wa of the tabular object W1 (W2) and relatively moving the ball abutting means 20 along the predetermined dividing line S, the ball abutting means 20 including a supporting part 21 for supporting a ball 22 in a freely rotatable manner like a ball-point pen and a lubricant supplying part 23 for supplying a lubricant to a gap 232 between the supporting part 21 and the ball 22; and an etching step of applying etching to the surface Wa of the tabular object W1 (W2). Since only the protection film 1a that covers the predetermined dividing line S is removed by the ball 22 of the ball abutting means 20, the tabular object can be divided without damaging a device D or generating chipping. |
