| 摘要 |
PROBLEM TO BE SOLVED: To suppress accumulation of position errors generated resulting from a non-integra multiple ratio of resolving power of a laser interferometer for detection of an amount of movement of an inspection object and a distance corresponding to an acquisition image first pixel in an inspection device.SOLUTION: A control device for generating an imaging device timing signal in an inspection device photographing an inspection object by the imaging device as moving the inspection object in a prescribed direction comprises: a movement-amount determination unit that detects an amount of movement of the inspection object on the basis of a count value to be acquired as an integral value from a laser interferometer for detecting the amount of movement of the inspection object to determine whether the detected amount of movement reaches a threshold; and a timing signal generation unit that generates the timing signal when the detected amount of movement is determined to reach the threshold. The movement-amount determination unit is configured to make determination using selectively a plurality of values as the threshold. |
