| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately detect fine irregularity existing in a measured object with a surface property similar to a specular surface.SOLUTION: A surface irregularity inspection device 1 according to the present invention is a surface irregularity inspection device 1 that comprises: an irradiation unit 3 that irradiates an inspected surface S of a measured object to be conveyed with line-shaped diffusion light so as to cross a conveyance direction and from above an inclining direction; an imaging unit 2 that photographs specularly-reflected reflection light of the diffusion light reflected upon the inspected surface S; and a detection unit 4 that detects irregularity of the inspected surface S on the basis of the reflection light photographed by the imaging unit 2. The irradiation unit 3 is configured to enable irradiation of first diffusion light and second diffusion light mutually different in a wavelength along a line orthogonal direction, and the imaging unit 2 is configured to photograph an image including first reflection light serving as reflection light of the first diffusion light and a second image including second reflection light serving as reflection light of the second diffusion light, and the detection unit 4 is configured to detect the irregularity of the inspected surface S on the basis of the image including the first reflection light and the image including the second reflection light. |
