ROTARY JOINT AND POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress generation of noise caused by rotation of a rotary joint.SOLUTION: A rotary joint 160 includes a rotating body 1600 rotating around a rotation axis A, a housing 1620 arranged around the rotating body 1600, and a bearing 1630 disposed between the rotating body 1600 and the housing 1620 and supporting rotation of the rotating body 1600. The rotary joint 160 supplies fluid to a polishing table on which a polishing pad for polishing a substrate is stuck or a retaining part retaining the substrate and pressing it to the polishing pad through a fluid connection port formed in the housing 1620 and a flow passage formed in an inside of the rotating body 1600. An elastic member 1640 is interposed at least in either of between the rotating body 1600 and the bearing 1630 and between the housing 1620 and the bearing 1630.