发明名称 GRINDING WHEEL AND METHOD FOR CLEANING GRINDING CHAMBER
摘要 PROBLEM TO BE SOLVED: To provide a grinding wheel that cleans a grinding chamber of a grinding device to prevent grinding chips from adhering to a surface to be ground of a workpiece, and to provide a method for cleaning the cleaning chamber.SOLUTION: A grinding wheel 5 includes a ring-shape base 50 disposing a grinding stone 60 in a ring-shape at the lower surface thereof and having multiple through-holes 58, 59 penetrating through an inside surface 56 and an outside surface 57 in a radial direction and provided in a circumferential direction for discharging grinding water. The through-holes are arranged at predetermined intervals in the circumferential direction and formed so as to scatter the grinding water in different directions.
申请公布号 JP2015199146(A) 申请公布日期 2015.11.12
申请号 JP20140077996 申请日期 2014.04.04
申请人 DISCO ABRASIVE SYST LTD 发明人 TSUNO TAKAHIKO
分类号 B24D7/00;B24B41/047;B24B47/26;B24B55/02;H01L21/304 主分类号 B24D7/00
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