| 发明名称 |
Top-Port MEMS Microphone and Method of Manufacturing the Same |
| 摘要 |
A top-port MEMS-microphone has an upper side and a bottom side. The microphone includes a MEMS chip with a monolithically connected protection element at the upper side, a backplate, and a membrane. The microphone also includes a sound inlet at the upper side and a mechanical or electrical connection at the bottom side. |
| 申请公布号 |
US2015326979(A1) |
申请公布日期 |
2015.11.12 |
| 申请号 |
US201214653820 |
申请日期 |
2012.12.18 |
| 申请人 |
EPCOS AG |
发明人 |
Ravnkilde Jan Tue;Giesen Marcel;Rasmussen Kurt;Ginnerup Morten;Rombach Pirmin Hermann Otto;Pahl Wolfgang;Leidl Anton;Schober Armin;Portmann Jürgen |
| 分类号 |
H04R19/04;H04R1/04;H04R31/00;H04R19/00 |
主分类号 |
H04R19/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
Muenchen DE |
