发明名称 PROCESSING METHOD
摘要 PROBLEM TO BE SOLVED: To prevent breakage of a work-piece by correctly positioning a measurement position of laser height measurement means at a position where the laser height measurement means should measure a height.SOLUTION: In a positional deviation detection step, a deviation between a position at which imaging means 13 photographs and a measurement position at which laser height measurement means 14 measures a height of a work-piece is detected. In an area detection step, the work-piece is photographed by the imaging means 13, and the laser height measurement means 14 calculates a position at which a height of the work-piece should be measured on the basis of the photographed image. In an upper surface height position measurement step, a deviation, which is detected in the positional deviation detection step, is added to the position which is detected in the area detection step thereby positioning the laser height measurement means 14, and thus, an upper surface height of the work-piece is measured. In a processing step, the work-piece is processed by processing means 12 on the basis of the height measured in the height measurement step, whereby the work-piece can be prevented from breakage.
申请公布号 JP2015199142(A) 申请公布日期 2015.11.12
申请号 JP20140077873 申请日期 2014.04.04
申请人 DISCO ABRASIVE SYST LTD 发明人 TAKAGI ATSUSHI
分类号 B24B49/12;B24B27/06;G01B11/02;H01L21/304 主分类号 B24B49/12
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