| 摘要 |
PROBLEM TO BE SOLVED: To provide a defective place prediction apparatus, a defective place prediction program and a defective place prediction method capable of efficiently correct a defective place.SOLUTION: A reliability calculation section 43 calculates confidence level of an identification model for identifying a defective place from a layout pattern. A correction priority calculation section 44 calculates the priority of correction by using the confidence level calculated by the reliability calculation section 43 with respect to the defective place identified from the layout pattern as the inspection object based on the identification model. |
