发明名称 PLASMA PROCESSING DETERMINATION SHEET
摘要 PROBLEM TO BE SOLVED: To properly determine appropriateness of plasma processing by a plasma processing device.SOLUTION: A plasma processing determination sheet 70 includes an indicator 50 and a color sample 72 colored in color of the indicator after irradiated with plasma. Thereby, a user can properly determine appropriateness of plasma processing by a plasma processing device by comparing color of the indicator with color of the color sample.
申请公布号 JP2015200531(A) 申请公布日期 2015.11.12
申请号 JP20140078342 申请日期 2014.04.07
申请人 FUJI MACH MFG CO LTD 发明人 NIWA AKIHIRO;SHINDO TAKAHIRO;KAWAKADO TETSUNORI
分类号 G01N21/78 主分类号 G01N21/78
代理机构 代理人
主权项
地址