METHOD OF INTRODUCING DOPANT TO GROUP 13 NITRIDE SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method of surely introducing a dopant to a predetermined group 13 nitride single crystal using a simple method.SOLUTION: A method of introducing a dopant to a group 13 nitride single crystal includes: a heating process in which the group 13 nitride single crystal, and both of a solid dopant source metal and a metal Ga are filled to a crucible, and the filling is heated to provide a mixed melt in which the group 13 nitride single crystal is immersed; and a melt annealing process in which the group 13 nitride single crystal is maintained to be immersed in the mixed melt obtained in the heating process to diffuse the dopant to the group 13 nitride single crystal from the mixed melt to introduce the dopant to the group 13 nitride single crystal.