发明名称 METHOD FOR MANUFACTURING WIRE BONDING STRUCTURE, WIRE BONDING STRUCTURE, AND ELECTRONIC DEVICE
摘要 This method for manufacturing a wire bonding structure is provided with: a step for preparing a wire formed of Cu; and a step for bonding the wire to a first subject to be bonded to, said first subject being formed on an electronic element. Prior to the bonding step, the wire has an outer circumferential surface and a retracted surface. The retracted surface is a surface retracted to the center axis side of the wire from the outer circumferential surface. In the bonding step, ultrasonic vibration is applied to the wire in a state wherein the retracted surface is pressed to the first subject.
申请公布号 WO2015170738(A1) 申请公布日期 2015.11.12
申请号 WO2015JP63293 申请日期 2015.05.08
申请人 ROHM CO., LTD. 发明人 IKOMA KAZUYA
分类号 H01L21/60;H01L21/607 主分类号 H01L21/60
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